Academics
Dop Course Outline
OS6098 Topics on Plasma-enhanced Thin Film
Last Revised: 2018-03-26
Course Objectives
The broad aim of this course is to provide the students with the knowledge of plasma technology for thin film process and applications.
Prerequisite
Textbook Journal papers
Topical Outline 1. Plasma technology
2. Plasma equipment
3. Sputtering system
4. High energy pulsed magnetron sputtering system
5. Thin-film material
6. Thin-film design
7. Thin-film process
8. Thin-film measurement and analysis
9. Thin-film properties
10. Plasma and thin-film
Prerequisite
Textbook Journal papers
Topical Outline 1. Plasma technology
2. Plasma equipment
3. Sputtering system
4. High energy pulsed magnetron sputtering system
5. Thin-film material
6. Thin-film design
7. Thin-film process
8. Thin-film measurement and analysis
9. Thin-film properties
10. Plasma and thin-film
