Academics
Dop Course Outline
OS7086 Introductions of Nano and Micro Fabrication
Last Revised: 2021-12-03
Course Objectives
幫助學生在取得微光電無塵室使用權限前，對半導體製程技術有基本的認識。
Prerequisite
Textbook "Semiconductor Manufacturing Technology by Michael Quirk & Julian Serda, Pearson, ISBN: 978-986-154-117-4"
Topical Outline Material Properties; Doping and Diffusion; Photolithography; Oxidation and Thin Films Deposition;Annealing; Etching.
Prerequisite
Textbook "Semiconductor Manufacturing Technology by Michael Quirk & Julian Serda, Pearson, ISBN: 978-986-154-117-4"
Topical Outline Material Properties; Doping and Diffusion; Photolithography; Oxidation and Thin Films Deposition;Annealing; Etching.
