Academics
Dop Course Outline
OS7086 Introductions of Nano and Micro Fabrication
Last Revised: 2020-10-05
Course Objectives
To equip the clean-room users with basic knowledge on the fabrication of semiconductor devices.
Prerequisite
Textbook Semiconductor Manufacturing Technology
by Michael Quirk & Julian Serda, Pearson, ISBN: 978-986-154-117-4
Topical Outline Material Properties; Doping and Diffusion; Photolithography; Oxidation and Thin Films Deposition;Annealing; Etching.
Prerequisite
Textbook Semiconductor Manufacturing Technology
by Michael Quirk & Julian Serda, Pearson, ISBN: 978-986-154-117-4
Topical Outline Material Properties; Doping and Diffusion; Photolithography; Oxidation and Thin Films Deposition;Annealing; Etching.
