陳昇暉
郭倩丞

Graphene, a sp2-hybridized carbon film with unique physical and chemical properties. Geim and Novoselov are first discovered the single layer graphene by using tape method in 2004, and became the hottest topic in various research area decade. This dissertation first focuses on the growth model of graphene crystal in order to pursue the precision growth time for graphene thin film. The graphene grain size was reached to 100 μm, the sheet resistance was 310 Ω/□ and the optical transmittance at 550 nm was 97.7%. Numerous samples were verified the growth model. Second, in order to get the large-scale graphene film which endued with single crystal properties, the single orientation of hexagonal graphene crystals have been fabricated on Cu (111) substrate. Moreover, Fourier Transformation was used as a notion to calculate the orientation of hexagonal graphene crystals, the result of the orientation was about 2 ~ 3o when graphene been synthesized on Cu (111). Graphene has been transferred to a BK7 glass substrate from Cu (111) for the sheet resistance and the average optical transmittance measurements, were 354 Ω/□ and 97.52%. Last part of this study is low temperature synthesis of graphene. We applied plasma-assisted CVD growing graphene film at operated temperature of 600oC on Cu foil. Pursuing the mechanism of low temperature synthesis of graphene, we measured the atomic spectra after hydrogen and methane ionized by electric field. In the experiment, the hydrogen flow rate was varied from 10 to 50 sccm, the 2D peak of Raman spectrum was increased with increasing the hydrogen flow rate, and this result was corresponded to the atomic spectra of hydrogen. In addition, we noticed that the content sources of plasma including hydrogen and by-products, meaning the additional hydrogen gas is not necessary. Finally, the high quality of graphene film was certified by using Raman spectroscopy.