課程介紹

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課程目標

薄膜沉積技術廣泛且應用很多，藉由課程介紹引領學生了解更多的薄膜成長方式，有助於未來研究及就業，減少學習時間，培養國內相關人才。

修習條件

主要教本

Handbook of Deposition Technologies for Films and Coatings (Third Edition)

內容大綱

1. Deposition Technologies: An Overview
2. Plasmas in Deposition Processes
3. Surface Preparation for Film and Coating Deposition Processes
4. Evaporation: Processes, Bulk Microstructures, and Mechanical Properties
5. Sputter Deposition Processes
6. Ion Plating
7. Chemical Vapor Deposition
8. Atomic Layer Deposition
9. Plasma-Enhanced Chemical Vapor Deposition of Functional Coatings
10. Unfiltered and Filtered Cathodic Arc Deposition
11. Vacuum Polymer Deposition
12. Thin Film Nucleation, Growth, and Microstructural Evolution: An Atomic Scale View
13. Glancing Angle Deposition
14. Nanocomposite Coatings for Severe Applications
15. Non-Elemental Characterization of Films and Coatings
16. Characterization of Thin Films and Coatings
17. Atmospheric Pressure Plasma Sources and Processing
18. Jet Vapor Deposition