課程介紹
課程大綱
OS7187-* 薄膜沉積技術 更新日期: 2025-02-22
課程目標
修習條件
主要教本
內容大綱
Chapter 2 - Plasmas in Deposition Processes
Chapter 3 - Surface Preparation for Film and Coating Deposition Processes
Chapter 4 - Evaporation: Processes, Bulk Microstructures, and Mechanical Properties
Chapter 5 - Sputter Deposition Processes
Chapter 6 - Ion Plating
Chapter 7 - Chemical Vapor Deposition
Chapter 8 - Atomic Layer Deposition
Chapter 9 - Plasma-Enhanced Chemical Vapor Deposition of Functional Coatings
Chapter 10 - Unfiltered and Filtered Cathodic Arc Deposition
Chapter 11 - Vacuum Polymer Deposition